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Benchmark
For critical dimensional measurement, OGP offers optical metrology systems tailored for wafer, photomask, slider, MEMS, semiconductor package, HDD suspension, probe card, and micro-component process measurements.
OGP Benchmark is engineered for high performance and reliability in a floor model package
XYZ Travel (mm)
Standard
300 x 300 x 200
Benchmark is a compact floor model system engineered for high performance and reliability. Its stage is ideal for medium format metrology applications that require high throughput, accuracy, and precision making it a world-class metrology system. Benchmark also offers:
- Built-in Measurement Stability – A granite support structure provides vibration isolation and measurement stability for use on the production floor. A rigid cast iron base ensures stability and metrological accuracy.
- Optical Interchangeable Lenses – Advanced fixed single-magnification or optional dual-magnification optics, illumination, image processing, and available Continuous Image Capture make it a world-class metrology system.
- Multisensor Versatility – Optional touch and scanning probes, TTL Laser, and Rainbow Probe
Increase your machine's performance with the right fixtures